Material · Precursor chemical

Trimethylgallium (TMG)

The principal gallium metalorganic precursor for MOCVD epitaxy of GaN and GaAs device layers, synthesized from high-purity gallium.

Facts on this page last re-verified Aug 15, 2026 — the oldest verification date among its current claims. How we verify.

Elements

Gallium

Facility flows

Sources